JPH0223034B2 - - Google Patents
Info
- Publication number
- JPH0223034B2 JPH0223034B2 JP57112320A JP11232082A JPH0223034B2 JP H0223034 B2 JPH0223034 B2 JP H0223034B2 JP 57112320 A JP57112320 A JP 57112320A JP 11232082 A JP11232082 A JP 11232082A JP H0223034 B2 JPH0223034 B2 JP H0223034B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- metal thin
- thin film
- tin metal
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 53
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 31
- 239000010409 thin film Substances 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 28
- 239000010408 film Substances 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 5
- 150000002611 lead compounds Chemical class 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000002356 single layer Substances 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 238000007733 ion plating Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000007772 electroless plating Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- YCKOAAUKSGOOJH-UHFFFAOYSA-N copper silver Chemical compound [Cu].[Ag].[Ag] YCKOAAUKSGOOJH-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000003878 thermal aging Methods 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- -1 LiTaO 3 Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Landscapes
- Ceramic Capacitors (AREA)
- Non-Adjustable Resistors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57112320A JPS592385A (ja) | 1982-06-28 | 1982-06-28 | 電子部品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57112320A JPS592385A (ja) | 1982-06-28 | 1982-06-28 | 電子部品 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS592385A JPS592385A (ja) | 1984-01-07 |
| JPH0223034B2 true JPH0223034B2 (en]) | 1990-05-22 |
Family
ID=14583716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57112320A Granted JPS592385A (ja) | 1982-06-28 | 1982-06-28 | 電子部品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS592385A (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07118554B2 (ja) * | 1986-01-16 | 1995-12-18 | 日本電装株式会社 | 積層型の圧電体装置 |
| JPS63219181A (ja) * | 1987-03-09 | 1988-09-12 | Tokin Corp | 圧電セラミクスの電極及びその形成方法 |
| JPS6477214A (en) * | 1987-09-17 | 1989-03-23 | Showa Electric Wire & Cable Co | Electrode for ultrasonic delay line |
| DE10196634T5 (de) * | 2000-09-18 | 2005-04-07 | Par Technologies Llc | Piezoelektrisches Antriebselement und ein solches verwendende Pumpe |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5571016A (en) * | 1978-11-22 | 1980-05-28 | Tdk Electronics Co Ltd | Method of manufacturing laminated porcelain capacitor |
| JPS55127011A (en) * | 1979-03-26 | 1980-10-01 | Tdk Electronics Co Ltd | Capacitor and method of manufacturing same |
| JPS55132061A (en) * | 1979-04-03 | 1980-10-14 | Tdk Corp | Hybrid circuit element and its manufacturing |
-
1982
- 1982-06-28 JP JP57112320A patent/JPS592385A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS592385A (ja) | 1984-01-07 |
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